By T.C. Hsia
Least-squares equipment
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Mechanical methods rely on contacting the surface with some form of lightly loaded stylus or probe. This is scanned over the surface to precisely known coordinate positions, and changes in its height from the surface are recorded. Possible damage to the surface can be avoided, as we have seen, by the use of noncontacting optical methods. 5 Optical slope probe. Surface Form 17 method to measure height variations, by triangulation ranging or slope determination followed by integration. 4 This measurement is undertaken by allowing a wavefront reflected from the surface under test to interfere coherently with a reference wavefront.
Waviness will give rise to peaks at one or more spatial frequencies. 41 42 Chapter 4 In the one-dimensional case the PSD, suggested as an alternative measure of texture in ISO 10110-8, can be expressed as PSD = A , fB for 1 1 12(a)] into a number of component parts that can be toleranced by the designer and related to system performance. Thus, the surface-form deviation measured can be analyzed into the best-fit spherical surface and the residual irregularity function. This can be further analyzed into a rotationally symmetric aspherical component and a final residual determining the RMS asymmetry. The ISO 10110-5:1996 document9 and an explanatory reference10 define the following metrics, requiring tolerancing in terms of fringe spacings where one unit is equal to one half the light wavelength.